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    Simplified subspaced regression network for identification of defect patterns in semiconductor wafer maps

    Adly, F. and Alhussein, O. and Yoo, Paul D. and Al-Hammadi, Y. and Taha, K. and Muhaidat, S. and Jeong, Y.-S. and Lee, U. and Ismail, M. (2015) Simplified subspaced regression network for identification of defect patterns in semiconductor wafer maps. IEEE Transactions on Industrial Informatics 11 (6), pp. 1267-1276. ISSN 1551-3203.

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    Abstract

    Wafer defects, which are primarily defective chips on a wafer, are of the key challenges facing the semiconductor manufacturing companies, as they could increase the yield losses to hundreds of millions of dollars. Fortunately, these wafer defects leave unique patterns due to their spatial dependence across wafer maps. It is thus possible to identify and predict them in order to find the point of failure in the manufacturing process accurately. This paper introduces a novel simplified subspaced regression framework for the accurate and efficient identification of defect patterns in semiconductor wafer maps. It can achieve a test error comparable to or better than the state-of-the-art machine-learning (ML)-based methods, while maintaining a low computational cost when dealing with large-scale wafer data. The effectiveness and utility of the proposed approach has been demonstrated by our experiments on real wafer defect datasets, achieving detection accuracy of 99.884% and R2 of 99.905%, which are far better than those of any existing methods reported in the literature.

    Metadata

    Item Type: Article
    School: Birkbeck Schools and Departments > School of Business, Economics & Informatics > Computer Science and Information Systems
    Depositing User: Paul Yoo
    Date Deposited: 12 Oct 2018 12:02
    Last Modified: 12 Oct 2018 12:02
    URI: http://eprints.bbk.ac.uk/id/eprint/24449

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